Electrically conductive properties of tungsten-containing diamond-like carbon films

Diamond and Related Materials

Volumn 15, Issue 11-12 SPEC. ISS., 2006, Pages 1902-1905

  Takeno, Takanori ^a   Miki, Hiroyuki ^a   Takagi, Toshiyuki ^a   Onodera, Hideya ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Diamond like carbon; Effective barrier height; Electrical conduction; Tungsten

Indexed keywords

ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS; SUPERCONDUCTING TRANSITION TEMPERATURE; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN;

EFFECTIVE BARRIER HEIGHT; FOUR PROBE METHOD; VACUUM CONDITION;

DIAMOND LIKE CARBON FILMS;

EID: 33751175654     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.06.020     Document Type: Article

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