Synthesis of vertically aligned carbon nanotubes on submicron-sized dot-catalyst array using plasma CVD method

Diamond and Related Materials

Volumn 17, Issue 4-5, 2008, Pages 772-775

  Matsuda, T ^a   Mesko, M ^a   Ogino, A ^a   Nagatsu, M ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

CNTs; Dot array; Field emission; Plasma CVD

Indexed keywords

CATALYSTS; ELECTRON BEAM LITHOGRAPHY; FIELD EMISSION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTOR QUANTUM DOTS; SYNTHESIS (CHEMICAL);

DOT-CATALYST ARRAY; FIELD ENHANCEMENT FACTOR; LIFT-OFF PROCESS;

CARBON NANOTUBES;

EID: 42949113175     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.08.030     Document Type: Article

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