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Volumn 1, Issue 4-5, 2001, Pages 317-320
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Investigating carbon materials for use as the electron emission source in a parallel electron-beam lithography system
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Author keywords
81.05.U; 85.35.K; 95.40.H; Carbon nanotubes; Diamond like carbon; Field emission
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Indexed keywords
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EID: 0042418317
PISSN: 15671739
EISSN: None
Source Type: Journal
DOI: 10.1016/S1567-1739(01)00030-X Document Type: Article |
Times cited : (13)
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References (6)
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