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Volumn 1, Issue 4-5, 2001, Pages 317-320

Investigating carbon materials for use as the electron emission source in a parallel electron-beam lithography system

Author keywords

81.05.U; 85.35.K; 95.40.H; Carbon nanotubes; Diamond like carbon; Field emission

Indexed keywords


EID: 0042418317     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1567-1739(01)00030-X     Document Type: Article
Times cited : (13)

References (6)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.