Interface diffusion of sputtered CoZrNb films on silicon substrate

Rare Metals

Volumn 25, Issue 6 SUPPL. 2, 2006, Pages 36-40

  LI, Xiaowei ^a   WANG, Leyun ^a   YANG, Jing ^a   ZENG, Fei ^a   PAN, Feng ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

CoZrNb films; interface diffusion; RBS

Indexed keywords

COBALT ALLOYS; INTERFACES (MATERIALS); SILICON; SPUTTERING; SUBSTRATES;

INTERFACE DIFFUSION; SILICON SUBSTRATE;

METALLIC FILMS;

EID: 42949094627     PISSN: 10010521     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1001-0521(08)60048-0     Document Type: Article

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