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Volumn 254, Issue 15, 2008, Pages 4650-4654
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The effect of electro-annealing on the electrical properties of ITO film on colorless polyimide substrate
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Author keywords
Electro annealing; Growth of crystallites; ITO; Sheet resistance; Transmittance
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Indexed keywords
ANNEALING;
CRYSTALLITES;
ELECTRIC PROPERTIES;
MAGNETRON SPUTTERING;
MICROSTRUCTURAL EVOLUTION;
OXIDE FILMS;
SHEET RESISTANCE;
ELECTRO-ANNEALING;
GROWTH OF CRYSTALLITES;
THERMAL ANNEALING;
TRANSMITTANCE;
INDIUM COMPOUNDS;
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EID: 42749092590
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2008.01.078 Document Type: Article |
Times cited : (28)
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References (30)
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