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Volumn 254, Issue 15, 2008, Pages 4650-4654

The effect of electro-annealing on the electrical properties of ITO film on colorless polyimide substrate

Author keywords

Electro annealing; Growth of crystallites; ITO; Sheet resistance; Transmittance

Indexed keywords

ANNEALING; CRYSTALLITES; ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; MICROSTRUCTURAL EVOLUTION; OXIDE FILMS; SHEET RESISTANCE;

EID: 42749092590     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.01.078     Document Type: Article
Times cited : (28)

References (30)
  • 24
    • 0003896792 scopus 로고
    • Thin Film Device Applications
    • K.L. Chopra I. Kaur Thin Film Device Applications 1983 Plenum Press New York, USA p. 130
    • (1983)
    • Chopra, K.L.1    Kaur, I.2
  • 25
    • 0003663187 scopus 로고
    • Microelectronic Materials
    • C.R.M. Grovenor Microelectronic Materials 1989 Adam Hilger Bristol, UK p. 197
    • (1989)
    • Grovenor, C.R.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.