Photoconductivity of DLC film deposited by pulsed discharge plasma CVD

Diamond and Related Materials

Volumn 17, Issue 4-5, 2008, Pages 676-679

  Kawai, S ^b   Shinagawa, T ^a   Noda, M ^a   Umeno, M ^a  

^a CHUBU UNIVERSITY   (Japan)

^b DENSO CORPORATION   (Japan)

Author keywords

Band gap; DLC; ESR; Photoconductivity; Pulsed discharge plasma CVD

Indexed keywords

ENERGY GAP; GAS MIXTURES; GRAPHITIZATION; PARAMAGNETIC RESONANCE; PHOTOCONDUCTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

PULSED DISCHARGE PLASMA CVD; SOLAR SIMULATORS;

DIAMOND LIKE CARBON FILMS;

EID: 42749090110     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2008.01.085     Document Type: Article

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