Porous SnO2 sputtered films with high H2 sensitivity at low operation temperature

Thin Solid Films

Volumn 516, Issue 15, 2008, Pages 5111-5117

  Shen, Yanbai ^a   Yamazaki, Toshinari ^a   Liu, Zhifu ^a   Jin, Chengji ^a   Kikuta, Toshio ^a   Nakatani, Noriyuki ^a  

^a UNIVERSITY OF TOYAMA   (Japan)

Author keywords

Gas sensor; H2; Palladium; Porosity; SnO2; Sputtering; Thin film

Indexed keywords

CRYSTALLITE SIZE; DENSITY (SPECIFIC GRAVITY); GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; TEMPERATURE DISTRIBUTION;

ELECTRONIC EFFECTS; FILM DENSITY; LOW OPERATION TEMPERATURE;

THIN FILMS;

EID: 42649102306     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.12.139     Document Type: Article

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