Gas temperature measurements in a microwave plasma by optical emission spectroscopy under single-wall carbon nanotube growth conditions

Journal of Physics D: Applied Physics

Volumn 41, Issue 9, 2008, Pages

  Garg, R K ^a   Anderson, T N ^b   Lucht, R P ^b   Fisher, T S ^b   Gore, J P ^b  

^a CUMMINS INC   (United States)

^b PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION (PROCESS); EXCITED STATES; METHANE; MICROWAVES; OPTICAL EMISSION SPECTROSCOPY; SINGLE-WALLED CARBON NANOTUBES (SWCN); TEMPERATURE MEASUREMENT;

MICROWAVE PLASMA POWER; MICROWAVE PLASMAS; PLASMA GAS TEMPERATURES;

PLASMAS;

EID: 42549142793     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/9/095206     Document Type: Article

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