Spectroscopical diagnostics of molecular microwave plasmas

Journal De Physique. IV : JP

Volumn 8, Issue 7, 1998, Pages

  Ropcke J ^a   Kaning M ^a   Lavrov, B P ^b  

^a Inst F Niedertemperatur P   (Germany)

^b ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOCIATION; DOPPLER EFFECT; HYDROCARBONS; LIGHT ABSORPTION; LIGHT EMISSION; MICROWAVES; MOLECULES; PLASMA SOURCES; PLASMAS; SPECTROSCOPY;

CORONA MODEL; MOLECULAR MICROWAVE PLASMAS; SPECTROSCOPICAL DIAGNOSTICS;

PLASMA DIAGNOSTICS;

EID: 0032181468     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:1998717     Document Type: Article

References (50)

1. Astashkevich S.A. , Käning M., Käning E., Kokina N.V. , Lavrov B.P. , Ohl A. and Röpcke J., J. Quantitative Spectroscopy & Radiative Transfer 56(1996), 725-751.
2. Melnikov A.S., Käning M., Lavrov B.P and Röpcke J., unpublished results, 1996.
3. 2 dissociation continuum and diagnostics of non-equilibrium plasmas", Frontiers in Low Temperature Plasma Diagnostics II, Bad Honnef 17-21 February 1997, Conf. Proceed. pp. 197-200.
4. Ohl A., Large Area Planar Microwave Discharges, in Microwave Discharges: Fundamentals and Applications, C M Ferreira (Ed.), Plenum, New York, 1993, pp. 205-214.
5. Ohl. A. and Röpcke J., Diamond and Related Material I, 243 (1992) 243-247.
6. Ohl A., Röpcke J. and Schleinitz W., Diamond and Related Materials 2(1993) 298-303.
7. Röpcke J., Ohl A. and Schmidt M., Journal of Analytical Spectrometry 8(1993) 803-808.
8. Ohl A., Strobel H., Röpcke J., Kammerstetter H., Pries A. and Schneider M., Surface and Coatings Technology 74-75(1995) 59-62.
9. Lavrov B. P. and Tyutchev M. V., Acta Phys. Hung. 55(1984) 411-426.
10. Lavrov B. P., Electronic-rotational spectra of diatomic molecules and diagnostics of non-equilibrium plasma, in: Plasma Chemistry, B. M. Smirnov (Ed.), Energoatomizdat, Moscow, 45 (1984).
11. Dratchev A.I. and Lavrov B.P., High Temp. 26(1988) 129-136.
12. Rousseau V., Boisse-Laporte C., Leprince Ph. and Marec J., Europhys. Lett. 18(1992) 499-504.
13. Coburn J.W. and Chen M., J. Vac. Sci.Technol. 18(1981) 353-356.
14. D'Agostino R., Cramarossa F., De Benedictis S. and Ferraro G., J. Appl. Phys. 52(1981) 1259-1265.
15. Laimer J., Huber F., Misslinger G. and Störi H., Vaccuum 47(1996) 183-186.
16. Gicquel A., Hassouni K., Breton Y., Chenevier M. and Cubertafon J.C., Diamond and Related Materials 5(1996) 366-372.
17. 2 microwave discharge", 12th ISPC, Minneapolis, 1995, J.V. Heberlein, D.W. Ernie and J.T. Roberts Eds., Conf. Proceed. pp. 331-336.
18. Richardson O. W., Molecular Hydrogen and Its Spectrum, (Yale U.P., New Haven, 1934).
19. Ginsburg N. and Dieke G. H., Phys.Rev. 59(1941) 632-644 .
20. Kovacs I., Lavrov B. P., Tyutchev M. V. and Ustimov V. I., Acta Phys. Hung. 54(1983) 161-187.
21. Lavrov B. P., Tyutchev M. V. and Ustimov V. I., Opt. Spectrosc. 64(1988) 745-748.
22. Lavrov B. P. and Pozdeev L. L., Opt. Spectrosc. 66(1989) 479-481.
23. Röpcke J. and Ohl A., Contrib. Plasma Phys. 34(1994) 575-586.
24. Sobolev N. N. (Ed.), Electron-excited molecules in non equilibrium plasma, Nova Science Publishers, New York, 1989, pp.148-155.
25. Solov'ev A. A., Plasma Phys. (USSR) 8(1982) 1241-1244.
26. Krysmanski K. H., Beitr. Plasmaphys. 23(1983) 505-512.
27. Kondo K., Okazaki K., Oyama H., Oda T., Sakamoto Y. and Iiyoshi A., Japan. J. Appl. Phys. 27(1988) 1560-1561.
28. Pealat M., Taran J. P. E., Taillet J., Bacal M. and Bruneteau A. M., J. Appl. Phys. 52(1881) 2687-2691.
29. Röpcke, J. and Ohl A., Contr. Plasma Phys. 31(1991) 669-679.
30. Fricke B., Diploma Work, Univ. Greifswald, 1995.
31. M. Käning, Thesis, Univ. Greifswald, 1997.
32. Kornejew P. and Bohmeyer W., Verhandl. DPG (VI) 26(1991) 331.
33. Ovtchinnikov V., INP-Report XIX , 1997.
34. Röpcke J., Lavrov B.P. and Ohl A.,"Spectroscopical investigations of planar microwave discharges", Frontiers in Low Temperature Plasma Diagnostics II, Bad Honnef 17-21 February 1997, Conf. Proceed. pp. 201-204.
35. Lavrov B.P., Käning M., Ovtchinnikov V.L. and Röpcke J., "Fine structure of Balmer-α lines and determination of translational temperature of hydrogen and deuterium containing plasmas", Frontiers in Low Temperature Plasma Diagnostics II, Bad Honnef 17-21 February 1997, Conf. Proceed. pp. 169-172.
36. Lavrov B. P., Opt. Spectrosc. 42(1977) 250-253.
37. Devjatov A.M., Kalinin A.V. and Miiovich S.R., Opt. Spectrosc. 71(1991) 525-526.
38. Schulz-von der Gathen V. and Döbele H.F., Plasma Chem. Plasma Process. 16(1996) 461-486.
39. Preppernau B.L., Dolson D.A., Gottscho R.A. and Miller T.A., Plasma Chem. Plasma Process. 9(1989) 157-164.
40. Wagner D., Dikmen B. and Döbele H.F., Rev. Sci. Instrum. 67(1996) 1800-1806.
41. Lavrov B.P. and Prosikhin V.P., Opt. Spectrosc. (USSR) 58(1985) 317-320.
42. Lishawa C.R., Feldstein J.W., Stewart T.N. and Muschlitz E.E., J. Chem. Phys. 83(1995 133-139.
43. Davies P. B. and Martineau P. M., Adv. Mater. 4(1992) 729-736.
44. Naito S., Ito N., Hattori T. and Goto T., Jpn. J. Appl. Phys. 33(1994) 5967-5970.
45. Haverlag M., Stoffels E., Stoffels W. W., Kroesen G. M. W. and De Hoog F.J. , J. Vac. Sci-Technol. A 12(1994) 3102-3108.
46. Rehle D., Diploma Work, Univ. Greifswald, 1995.
47. Davies P. B. and Martineau P. M., J. Appl. Phys. 71(1992) 6125-6135.
48. Fan W.Y., Röpcke J. and Davies P.B., J. Vac. Sci. Technol. A 14(1996) 2970-2972.
49. Yamada C., Hirota E. and Kawaguchi K., J. Chem. Phys. 75(1981) 5256-5264.
50. Wormhoudt J. and McCurdy K.E., Chem. Phys. Lett. 156(1989) 47-50.