Technology of silicon-based MEMS

Jixie Qiangdu/Journal of Mechanical Strength

Volumn 23, Issue 4, 2001, Pages 523-526

  Hao, Yilong ^a   Zhang, Lixian ^a   Li, Ting ^a   Zhang, Dacheng ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

Bulk micromachining technology; Deep etching; Micro electro mechanical system; Sacrificial layers

Indexed keywords

EID: 0035697564     PISSN: 10019669     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)