Modelling and compensation of quadrature error for silicon MEMS microgyroscope

Proceedings of the International Conference on Power Electronics and Drive Systems

Volumn 2, Issue , 2001, Pages 871-876

  Yeh, Bao Y ^a   Liang, Yung C ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Low rate microgyroscope; Quadrature error

Indexed keywords

CAPACITORS; ERROR ANALYSIS; GYROSCOPES; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SILICON SENSORS;

LOWER CAPACITOR BANKS; QUADRATURE ERROR; SILICON MICROGYROSCOPE; UPPER CAPACITOR BANKS;

MICROELECTRONICS;

EID: 0035744023     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Electrostatic comb drive for resonant and actuator applications
2. Micro machined vibratory rate gyroscope
3. Analytical modelling of cross-axis coupling in micromechanical springs
4. Simulation of microelectromechanical systems