-
9
-
-
0029732666
-
-
San Diego, CA, USA, pp. 441-446
-
J. Branebjerg, P. Gravesen, J. P. Krog and C. R. Nielsen, in Micro Electro Mechanical Systems, MEMS ′96, Proceedings. 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems'. IEEE, The Ninth Annual International Workshop, San Diego, CA, USA, 1996, pp. 441-446
-
(1996)
Micro Electro Mechanical Systems, MEMS ′96, Proceedings. 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems'. IEEE, the Ninth Annual International Workshop
-
-
Branebjerg, J.1
Gravesen, P.2
Krog, J.P.3
Nielsen In, C.R.4
-
16
-
-
85022115784
-
-
Enschede, The Netherlands, pp. 237-243
-
H. Mensinger, T. Richer, V. Hessel, J. Dopper and W. Ehrfeld, in Proc. Micro Total Anal. Syst. Workshop, Enschede, The Netherlands, 1994, pp. 237-243
-
(1994)
Proc. Micro Total Anal. Syst. Workshop
-
-
Mensinger, H.1
Richer, T.2
Hessel, V.3
Dopper, J.4
Ehrfeld In, W.5
-
20
-
-
0027187354
-
-
pp. 248-253
-
R. Miyake, T. S. J. Lammerink, M. Elwenspoek and J. H. J. Fluitman, in Micro Electro Mechanical Systems, MEMS ′93, Proceedings 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', IEEE., 1993, pp. 248-253
-
(1993)
Micro Electro Mechanical Systems, MEMS ′93, Proceedings 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', IEEE.
-
-
Miyake, R.1
Lammerink, T.S.J.2
Elwenspoek, M.3
Fluitman In, J.H.J.4
-
28
-
-
0033684370
-
-
R. H. Liu M. A. Stremler K. V. Sharp M. G. Olsen J. G. Santiago R. J. Adrian H. Aref D. J. Beebe J. Microelectromech. Syst. 2000 9 190 197
-
(2000)
J. Microelectromech. Syst.
, vol.9
, pp. 190-197
-
-
Liu, R.H.1
Stremler, M.A.2
Sharp, K.V.3
Olsen, M.G.4
Santiago, J.G.5
Adrian, R.J.6
Aref, H.7
Beebe, D.J.8
-
45
-
-
0035010315
-
-
Interlaken, Switzerland, pp. 483-486
-
Y.-K. Lee, J. Deval, P. Tabeling and C.-M. Ho, in Micro Electro Mechanical Systems, MEMS 2001, The 14th IEEE International Conference, Interlaken, Switzerland, 2001, pp. 483-486
-
(2001)
Micro Electro Mechanical Systems, MEMS 2001, the 14th IEEE International Conference
-
-
Lee, Y.-K.1
Deval, J.2
Tabeling, P.3
Ho In, C.-M.4
-
46
-
-
6344237977
-
-
pp. 663-666
-
P. Huang and K. S. Breuer, in TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th IEEE International Conference, 2003, pp. 663-666
-
(2003)
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th IEEE International Conference
-
-
Huang, P.1
Breuer In, K.S.2
-
54
-
-
0034295912
-
-
J. C. Rife M. I. Bell J. S. Horwitz M. N. Kabler R. C. Y. Auyeung W. J. Kim Sens. Actuators, A 2000 86 135 140
-
(2000)
Sens. Actuators, a
, vol.86
, pp. 135-140
-
-
Rife, J.C.1
Bell, M.I.2
Horwitz, J.S.3
Kabler, M.N.4
Auyeung, R.C.Y.5
Kim, W.J.6
-
55
-
-
85022112926
-
-
pp. 937-940
-
T. R. Tsao, R. M. Moroney, B. A. Martin and R. M. White, in Ultrasonics Symposium, Proceedings., IEEE, 1991, pp. 937-940
-
(1991)
Ultrasonics Symposium, Proceedings., IEEE
-
-
Tsao, T.R.1
Moroney, R.M.2
Martin, B.A.3
White In, R.M.4
-
62
-
-
52649132739
-
-
Boston, Massachusetts, USA, pp. 1038-1041
-
A. Plecis, R. B. Schoch and P. Renaud, in MicroTAS, Boston, Massachusetts, USA, 2005, pp. 1038-1041
-
(2005)
MicroTAS
-
-
Plecis, A.1
Schoch, R.B.2
Renaud In, P.3
-
64
-
-
77954280959
-
-
Tokyo, Japan, pp. 522-524
-
S. J. Kim, Y.-C. Wang, H. Jang, J. H. Lee and J. Han, in MicroTAS, Tokyo, Japan, 2006, pp. 522-524
-
(2006)
MicroTAS
-
-
Kim, S.J.1
Wang, Y.-C.2
Jang, H.3
Lee, J.H.4
Han In, J.5
|