The fabrication, characterization and testing of a MEMS circular diaphragm mass sensor

Journal of Micromechanics and Microengineering

Volumn 18, Issue 2, 2008, Pages

  Ismail, A K ^a   Burdess, J S ^b   Harris, A J ^b   Suarez, G ^c   Keegan, N ^b   Spoors, J A ^b   Chang, S C ^d   McNeil, C J ^b   Hedley, J ^b  

^a UNIVERSITI TEKNOLOGI MALAYSIA   (Malaysia)

^b NEWCASTLE UNIVERSITY   (United Kingdom)

^c CSEM   (Switzerland)

^d Pusan National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; ELECTROSTATICS; LASER DOPPLER VELOCIMETERS; MEMS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

CIRCULAR DIAPHRAGM MASS SENSORS; LASER DOPPLER VIBROMETRY; OPTICAL SURFACE PROFILOMETRY;

MICROSENSORS;

EID: 42549114192     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/2/025021     Document Type: Article

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