Applications of laser plasma EUV source based on a gas puff target

AIP Conference Proceedings

Volumn 993, Issue , 2008, Pages 379-382

  Bartnik, A ^a   Fiedorowicz, H ^a   Jarocki, R ^a   Kostecki, J ^a   Rakowski, R ^a   Szczurek, A ^a   Szczurek, M ^a  

^a MILITARY UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

EUV; Gas puff target; Laser plasma; Luminescence

Indexed keywords

EID: 42449152761     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2909153     Document Type: Conference Paper

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