Mass production of InAs Hall elements by MBE

Journal of Crystal Growth

Volumn 175-176, Issue PART 1, 1997, Pages 13-21

  Shibasaki, Ichiro ^a  

^a ASAHI CHEMICAL INDUSTRY CO   (Japan)

Author keywords

InAs Hall element; InAs quantum well; InSb Hall element; Mass production MBE

Indexed keywords

MAGNETIC THIN FILM DEVICES; MOLECULAR BEAM EPITAXY; SEMICONDUCTING FILMS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR GROWTH; SEMICONDUCTOR QUANTUM WELLS; VACUUM DEPOSITED COATINGS;

MAGNETIC SENSORS;

HALL EFFECT DEVICES;

EID: 4244203258     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(96)00924-4     Document Type: Article

References (12)

1. I. Shibasaki, The 8th Sensors Symp. C3-1,Tech. Dig. (IEE, Tokyo, 1989) p. 211.
2. I. Shibasaki, Y. Kanayama, T. Ito, F. Ichimori, T. Yoshida, K. Nagase and K. Harada, 1991 Int. Conf. on Solid-State Sensors and Actuators (Transducers. '91), Dig. Tech. Papers (IEEE, USA, 1991) p. 1068.
3. Y. Kanayama, K. Nagase, S. Muramatsu, A. Ichii, T. Iwabuchi, T. Yoshida, F. Ichimori, T. Ito and I. Shibasaki, Proc. 4th Int. Symp. on Micro Machine and Human Science (1993) p. 165.
4. I. Shibasaki, IEEE Lasers and Electro-Optics Society 1995 Annual Meeting, Conf. Proc., Vol. 1 (1995) p. 85.
5. T. Iwabuchi, T. Ito, M. Yamamoto, K. Sako, Y. Kanayama, K. Nagase, T. Yoshida, F. Ichimori and I. Shibasaki, J. Crystal Growth 150 (1995) 1302.
6. I. Shibasaki, T. Kajino and K. Tajika, Japan patent P1598818 (Application: July 13, 1982).
7. M. Yamamoto, T. Iwabuchi, T. Ito, T. Yoshida, H. Imai, T. Isoya and I. Shibasaki, J. Crystal Growth 175/176 (1997) 191.
8. K. Nagase, S. Muramatsu, N. Kuze, A. Ichii, I. Shibasaki and K. Mori, The 7th Int. Conf. on Solid-State Sensors and Actuators (Transducers '93) D12-07, Dig. Tech. Papers, Late News (IEE, Tokyo, 1993) p. 32.
9. N. Kuze, K. Nagase, S. Muramatsu, S. Miya, T. Iwabuchi, A. Ichii and I. Shibasaki, J. Crystal Growth 150 (1995) 1307.
10. S. Miya, S. Muramatsu, N. Kuze, K. Nagase, T. Iwabuchi, A. Ichii, M. Ozaki and I. Shibasaki, J. Electron. Mater. 25 (1996) 415.
11. N. Kuze, H. Goto, S. Miya, S. Muramatsu, M. Matsui and I. Shibasaki, Material Research Symp. Proc., Vol. 399, Boston, 1995 (Material Research Society, Evolution of Epitaxial Structure and Morphology, 1996) p. 165.
12. N. Kuze, H. Goto, M. Matsui, I. Shibasaki and H. Sakaki, J. Crystal Growth 175/176 (1997) 868.