Experimental multilayer survey in the VUV

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3152, Issue , 1997, Pages 222-230

  Schäfers, Franz ^a   Mertins, Hans Christoph ^a   Mertin, M ^a   Packe, Ingo ^a   Schmolla, F ^a   Di Fonzo, Silvia ^b   Soullie, G ^b   Jark, Werner H ^b   Grimmer, Hans ^c   Böni, Peter ^c   Clemens, Daniel ^c   Horisberger, Michael ^c   Salashchenko, Nikolai N ^d   Shamov, E A ^d  

^a HAHN MEITNER INSTITUT   (Germany)

^b SINCROTRONE TRIESTE   (Italy)

^c SWISS FEDERAL INSTITUTE OF TECHNOLOGY   (Switzerland)

^d INSTITUTE FOR PHYSICS OF MICROSTRUCTURES   (Russian Federation)

Author keywords

Circularly polarized light; Multilayers; Polarimeter; Reflection; Reflectometer; Soft x ray radiation; Synchrotron radiation; Transmission; Water window

Indexed keywords

CHROMIUM; ELECTROMAGNETIC WAVES; LIGHT POLARIZATION; LIGHT REFLECTION; MATERIALS; MIRRORS; OPTICAL INSTRUMENTS; POLARIMETERS; RADIATION; RADIATION DETECTORS; REFLECTION; REFLECTOMETERS; SCANDIUM; SURVEYS; SYNCHROTRON RADIATION; SYNCHROTRONS; TRANSITION METALS; WINDOWS; X RAY LITHOGRAPHY; X RAY PRODUCTION;

CIRCULARLY POLARIZED LIGHT; POLARIMETER; REFLECTOMETER; SOFT X-RAY RADIATION; TRANSMISSION; WATER WINDOW;

MULTILAYERS;

EID: 4244113719     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.295560     Document Type: Conference Paper

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36. for further information on the multilayer survey see: http://www-cxro.lbl.gov/multilayer/survey.html