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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6730, Issue , 2007, Pages

Polarization aberration modeling via jones matrix in the context of OPC

(3) Zhang, Qiaolin a Song, Hua a Lucas, Kevin a

Author keywords

Jones matrix; Jones pupil; Optical model accuracy; Optical Proximity Correction (OPC); Optical proximity effect (OPE); Polarization aberration

Indexed keywords

ABERRATIONS; IMAGE ENHANCEMENT; IMAGE RESOLUTION; IMAGING SYSTEMS; LITHOGRAPHY; POLARIZATION;

JONES MATRIX; JONES PUPIL; OPTICAL MODEL ACCURACY; OPTICAL PROXIMITY CORRECTION (OPC); OPTICAL PROXIMITY EFFECT (OPE); POLARIZATION ABERRATION; POLARIZED ILLUMINATION;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 42149165720 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.746710 Document Type: Conference Paper

Times cited : (10)

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