Measurements of corner rounding in 2D contact holes on phase-shift masks using broadband reflectance and transmittance spectra in conjunction with RCWA

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6730, Issue , 2007, Pages

  Gray, Alexander ^a   Lam, John C ^b   Chen, Stanley ^b   Richter, Jan ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b N and K Technology Inc   (United States)

^c Advanced Mask Technology Center GmbH and Co KG   (Germany)

Author keywords

2D scatterometry; Broadband transmittance measurements; Contact structures; Corner rounding; Critical dimensions; ForouhiBloomer dispersion equations; Metrology; RCWA

Indexed keywords

2D SCATTEROMETRY; BROADBAND TRANSMITTANCE MEASUREMENTS; CONTACT STRUCTURES; CORNER ROUNDING; CRITICAL DIMENSIONS; FOROUHIBLOOMER DISPERSION EQUATIONS;

LIGHT POLARIZATION; MEASUREMENT THEORY; NUMERICAL METHODS; OPTICAL RESOLVING POWER;

LIGHT REFLECTION;

EID: 42149146924     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.747569     Document Type: Conference Paper

References (4)

1. Gray, A. et al., Proc. SPIE 6349, 634949 (2006)
2. Lam, J.C. et al., Proc. SPIE 6607, 660710 (2007)
3. Forouhi, A.R. and Bloomer, I., Phys. Rev. B 34, 7018 (1986)
4. Moharam, M.G. et al., J. Opt. Soc. Am. A 12, 1068 (1995)