Fabrication and characterization of graded refractive index silicon oxynitride thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 4, 1997, Pages 2088-2094

  Callard, S ^a   Gagnaire, A ^a   Joseph, J ^a  

^a ECOLE CENTRALE DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031506420     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580614     Document Type: Article

References (16)

1. A. C. Greenham, B. A. Nichols, R. M. Wood, and K. L. Lewis, Opt. Eng. (Bellingham) 32, 1018 (1993).
2. S. Lim, J. H. Ryu, J. F. Wager, and L. M. Casas, Thin Solid Films 236, 64 (1993).
3. H. Southwell, Appl. Opt. 28, 5091 (1989).
4. B. G. Bovard, Appl. Opt. 29, 24 (1990).
5. M. F. Oulette, R. V. Lang, K. L. Yan, R. W. Bertram, R. S. Owle, and D. Vincent, J. Vac. Sci. Technol. A 9, 1188 (1991).
6. P. G. Snyder, Y.-M. Xiong, J. A. Woollam, G. A. Al-Jumaily, and F. J. Gagliardi, J. Vac. Sci. Technol. A 10, 1462 (1992).
7. S. Callard, A. Gagnaire, and J. Joseph, Appl. Phys. Lett. 68, 2335 (1996).
8. C. K. Carniglia, J. Opt. Soc. Am. 7, 848 (1990).
9. G. Paijadis de Larivière, J. M. Frigerio, J. Rivory, and F. Abelès, Appl. Opt. 31, 6056 (1992).
10. A. E. T. Kuiper, S. W. Koo, F. H. P. M. Habraken, and Y. Tamminga, J. Vac. Sci. Technol. B 1, 62 (1983).
11. D. E. Aspnes and J.B. Theeten, J. Appl. Phys. 50, 4928 (1979).
12. D. A. G. Bruggeman, Ann. Phys. (Leipzig) 24, 636 (1935).
13. J. Joseph and A. Gagnaire, Thin Solid Films 103, 257 (1983).
14. R. M. A. Azzam and N.M. Bashara, Ellipsometry and Polarized Light (North-Holland, Oxford, 1977).
15. M. Luttman, Thesis, Université Joseph-Fournier-Grenoble 1, Grenoble, France, 1993.
16. Y. Z. Hu, J. Joseph, and E. A. Irene, J. Vac. Sci. Technol. A 11, 1786 (1993).