Scanning force microscope measurement of the parameters of the profiles of submillimeter VLSI components

Measurement Techniques

Volumn 44, Issue 1, 2001, Pages 44-48

  Gornev, E S ^a,b   Novikov, Y A ^a,b   Plotnikov, Y I ^a,b   Rakov, A V ^a,b  

^a NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

^b UNIV PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 27544484189     PISSN: 05431972     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1010968713323     Document Type: Article

References (9)

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