A gas barrier film composed of SiO2/Al2O3 multilayers on flexible substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6655, Issue , 2007, Pages

  Liao, Jung Yu ^a   Liu, Pei Ching ^a   Yeh, Yu Hsin ^a   Tseng, Mei Rurng ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Al2O3; Ca test; Gas barrier; SiO2; Water Vapor Transmission Rate (WVTR)

Indexed keywords

ALUMINUM COMPOUNDS; SILICA; SUBSTRATES; WATER VAPOR;

GAS BARRIER; WATER VAPOR TRANSMISSION RATE (WVTR);

MULTILAYERS;

EID: 42149090478     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.733500     Document Type: Conference Paper

References (16)

1. J. Lewis, "Material challenge for flexible organic devices," Materials today, 9(4), 38-45 (2006).
2. M. J. Thompson, "A vacuum roll-to-roll process for manufacturing OLEDs," Solid State Technol., 47(5), 30-32 (2004).
3. A. Sugimoto, H. Ochi, S. Fujimura, A. Yoshida, T. Miyadera, and M. Tsuchida, IEEE J. Sel. Top. Quant, 10, 107-114 (2004).
4. K. Toshikawa, J. Miyano, A. Yokotani, K. Kurosawa, Y. Matsumoto, "Applications of OLEDs that use VUV-CVD films," J. SID, 13(5), 452-457 (2005).
5. LAN technical service co., http://www.lantechnical.co.jp/english/seihin/ vuv/index.html.
6. A. Shih and C. -S. Jou, "Method for forming a passivation layer for organic light-emitting devices," US patent 2003/0030369A1 (2003).
7. Dielectric Systems Inc., http://www.dielectricsys.com/.
8. M. Yan et al., "A Transparent, high barrier, and high heat substrate for organic electronics," Proc. IEEE, 93(8), 1468-1477 (2005).
9. K. Akedo, A. Miura, H. Fujikawa, and Y. Taga, SID 03 Digest, 559-561(2003).
10. K. -J. Chen and Y. -M. Tsai, "Method for forming encapsulation structure for organic light-emitting device," US patent 2004/0197944A1 (2004).
11. L. Zambov et al., "Advanced chemical vapor deposition silicon carbide barrier technology for ultralow permeability applications," J. Vac. Sci. Technol. A, 24(5), 1706-1713 (2006).
12. x stacks on flexible polymer substrates," J. Electrochem. Soc., 153(10), F244-F248 (2006).
13. Symmorphix Co., http://www.symmorphix.com/.
14. 3 gas diffusion barriers grown by atomic layer deposition on polymers," Appl. Phys. Lett, 89, 031915 (2006).
15. J. -Y. Liao, P. -C. Liu, C. -H. Hsiao, C. -L. Huang, J. -H. Lee, C. -S. Chang, and M. -R. Tseng, "The characterization of the gas barrier comprising Parylene-C thin films for flexible OLED application," Proc. IDW06, 1287-1290 (2006).
16. J. A. Thornton and D. W. Hoffman, J. Vac. Sci. Technol. 14, 164 (1977).