Applications of OLEDs that use VUV-CVD films

Journal of the Society for Information Display

Volumn 13, Issue 5, 2005, Pages 453-457

  Toshikawa, Kiyohiko ^a,b   Miyano, Junichi ^c   Yokotani, Atsushi ^b   Kurosawa, Kou ^b   Matsumoto, Yoshiie ^d  

^a WP Engineering Development Department   (Japan)

^b UNIVERSITY OF MIYAZAKI   (Japan)

^c Miyazaki Oki Electric Co Ltd   (Japan)

^d Lantechnical Service Co Ltd   (Japan)

Author keywords

Excimer lamp; Octamethylcylotertrasiloxane (OMCTS); Photo CD; Vacuum ultaviolet

Indexed keywords

ELECTRIC PROPERTIES; ELECTROMAGNETIC WAVES; LIGHTING; LOW TEMPERATURE PRODUCTION; MULTIPHOTON PROCESSES; NANOTRIBOLOGY; PHOTONS; THEOREM PROVING; THICK FILMS; VACUUM; VACUUM DEPOSITION;

COATING DEPOSITIONS; ELECTRICAL PROPERTIES; EXCIMER LAMP; EXCIMER LAMPS; LOW STRESSES; OCTAMETHYLCYLOTERTRASILOXANE (OMCTS); ORGANIC SILOXANES; PHOTO-CD; PLANARIZING; PRESSURE CONDITIONS; ROOM TEMPERATURES; THERMAL RESISTANCES; THIN-FILMS; ULTRA-VIOLET; VUV PHOTONS;

CHEMICAL VAPOR DEPOSITION;

EID: 33646892611     PISSN: 10710922     EISSN: None     Source Type: Journal    
DOI: 10.1889/1.1927739     Document Type: Article

References (5)

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3. 2 films deposited by photon-assisted CVD with vacuum-ultraviolet excimer lamp," IEICE Trans Electro J86-C, No, 8, 913-919 (2003).
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