The characterization of the gas barrier comprising Parylene-C thin films for flexible OLED application

IDW '06 - Proceedings of the 13th International Display Workshops

Volumn 2, Issue , 2006, Pages 1287-1290

  Liao, J Y ^a   Liu, P C ^a   Hsiao, C H ^b   Huang, C L ^a   Lee, J H ^a   Chang, C S ^a   Tseng, M R ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CALCIUM; CHEMICAL VAPOR DEPOSITION; FILM PREPARATION; HELMET MOUNTED DISPLAYS; MULTILAYER FILMS; MULTILAYERS; ORGANIC LIGHT EMITTING DIODES (OLED); SURFACE ROUGHNESS; TECHNICAL PRESENTATIONS;

BARRIER PROPERTIES; C FILMS; GAS BARRIERS; ICP-CVD; MULTILAYER BARRIERS; OLED DEVICES; OPTICAL-; PARYLENE; TEST METHODS;

GAS PERMEABLE MEMBRANES;

EID: 42149189106     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Malcolm J. Thompson, "A Vacuum Roll-to-roll Process for Manufacturing OLEDs," Solid State Technol., 47 (2004), pp. 30-32.
2. th International Display Workshops (IDW 2001), pp. 1435-1438.
3. C. C. Chiang, D. S. Wuu, H. B. Lin, Y. P. Chen, T. N. Chen, Y. C. Lin, C. C. Wu, W. C. Chen, T. H. Jaw, and R. H. Horng, "Deposition and Permeation Properties of SiNx/Parylene Multilayers on Polymeric Substrates," Surf. Coat. Tech., 200 (2006), pp. 5843-5848.
4. S.-H. K. Park, J. Oh, C.-S. Hwang, J.-I. Lee, Y. S. Yang, and H. Y. Chu, "Ultrathin Film Encapsulation of an OLED by ALD," Electrochem. Solid St., 8, (2005), pp. H21-H23.