Comparison of cleanroom samplers for inorganic airborne molecular contaminants

Separation Science and Technology

Volumn 43, Issue 4, 2008, Pages 842-861

  Lin, I Kai ^a   Bai, Hsunling ^a   Liu, Cheng Chang ^a   Wu, Bi Jun ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Airborne molecular contamination (AMC); Cleanroom; Diffusion denuder sampler (DDS); Impinger air sampler; Micro contamination; Semiconductor device

Indexed keywords

CONCENTRATION (PROCESS); MOLECULAR STRUCTURE; SEMICONDUCTOR DEVICES; SILICA GEL;

AIRBORNE MOLECULAR CONTAMINATION (AMC); CLEANROOM; DIFFUSION DENUDER SAMPLER (DDS); IMPINGER AIR SAMPLER; MICRO-CONTAMINATION;

AIR POLLUTION;

AIR POLLUTION; CONCENTRATION (PROCESS); MOLECULAR STRUCTURE; SEMICONDUCTOR DEVICES; SILICA GEL;

CLEANROOM; CONTAMINANT; CONTAMINATION; DIFFUSION; MOLECULAR STRUCTURE; SILICON DIOXIDE;

EID: 41849148300     PISSN: 01496395     EISSN: 15205754     Source Type: Journal    
DOI: 10.1080/01496390701870580     Document Type: Article

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