Impact of airborne molecular contamination to nano-device performance

Proceedings of the IEEE Conference on Nanotechnology

Volumn 2002-January, Issue , 2002, Pages 461-464

  Yeh, Ching Fa ^a   Hsiao, Chih Wen ^a   Lin, Shiuan Jeng ^a   Xie, Zhi Min ^a   Kusumi, Toshio ^b   Aomi, Hideki ^b   Kaneko, Hideo ^b   Da, Bau Tong ^c   Tsai, Ming Shih ^c  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b DAIKIN INDUSTRIES LTD   (Japan)

^c NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

Chromium; Contamination; Filters; Industrial electronics; Inorganic chemicals; Manufacturing; Nanoscale devices; Organic chemicals; Oxidation; Sampling methods

Indexed keywords

CHROMIUM; CONTAMINATION; FILTERS (FOR FLUIDS); INDUSTRIAL CHEMICALS; INDUSTRIAL ELECTRONICS; MANUFACTURE; NANOTECHNOLOGY; ORGANIC CHEMICALS; OXIDATION;

AIRBORNE MOLECULAR CONTAMINATION; CHEMICAL FILTERS; DEVICE PERFORMANCE; INORGANIC CONTAMINATION; MANUFACTURING ENVIRONMENTS; NANOSCALE DEVICE; SAMPLING METHOD; WAFER SAMPLING;

INORGANIC CHEMICALS;

EID: 41849092953     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2002.1032289     Document Type: Conference Paper

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