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Volumn 20, Issue 6-7, 2001, Pages 336-345
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Application of ion chromatography in the semiconductor industry
a
a
AIR LIQUIDE
(France)
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Author keywords
Ion chromatography; Semiconductor chemicals; Semiconductor gases; Semiconductor materials; Trace analysis
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Indexed keywords
CHROMATOGRAPHY;
CONTAMINATION;
POSITIVE IONS;
SPECTROSCOPIC ANALYSIS;
SEMICONDUCTOR INDUSTRY;
SEMICONDUCTOR MATERIALS;
ACID;
HYDROGEN PEROXIDE;
ORGANIC SOLVENT;
WATER;
AIR ANALYSIS;
CHEMICAL ANALYSIS;
DEVICE;
GAS ANALYSIS;
ION PAIR CHROMATOGRAPHY;
PRIORITY JOURNAL;
REVIEW;
SEMICONDUCTOR;
TECHNIQUE;
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EID: 0034968367
PISSN: 01659936
EISSN: None
Source Type: Journal
DOI: 10.1016/S0165-9936(01)00075-9 Document Type: Article |
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Times cited : (19)
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References (38)
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