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Volumn 1, Issue , 2006, Pages 956-959
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Redistribution of recombination active defects and trapping effects in multicrystalline silicon after wet thermal oxidation
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Author keywords
[No Author keywords available]
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Indexed keywords
CONCENTRATION (PROCESS);
ELECTRON TRAPS;
GRAIN BOUNDARIES;
IRON COMPOUNDS;
THERMOOXIDATION;
INTERSTITIAL IRON;
MULTICRYSTALLINE SILICON;
SILICON BLOCK MATERIALS;
WET THERMAL OXIDATION;
POLYSILICON;
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EID: 41749121197
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/WCPEC.2006.279615 Document Type: Conference Paper |
Times cited : (2)
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References (4)
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