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Volumn 2, Issue , 2006, Pages 1271-1274
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Investigation of the surface passivation of P+-Type SI emitters by PECVD silicon carbide films
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Author keywords
[No Author keywords available]
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Indexed keywords
BORON;
PASSIVATION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SILICON WAFERS;
SURFACE PHENOMENA;
BORON EMITTERS;
EMITTERS;
SURFACE PASSIVATION;
THIN FILMS;
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EID: 41749110010
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/WCPEC.2006.279645 Document Type: Conference Paper |
Times cited : (4)
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References (10)
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