Calibration standards verification procedure using the calibration comparison technique

Proceedings of the 36th European Microwave Conference, EuMC 2006

Volumn , Issue , 2006, Pages 489-491

  Rumiantsev, Andrej ^a   Doerner, Ralf ^b   Thies, Steffen ^c  

^a SUSS MicroTec Lithography GmbH   (United States)

^b LEIBNIZ INSTITUT FÜR HÖCHSTFREQUENZTECHNIK   (Germany)

^c Rosenberger Hochfrequenztechnik GmbH and Co KG   (Germany)

Author keywords

Calibration; Calibration comparison; Error correction; Scattering parameters measurement

Indexed keywords

ERROR CORRECTION; IMPEDANCE MATCHING (ELECTRIC); SCATTERING PARAMETERS; SUBSTRATES; VERIFICATION;

CALIBRATION COMPARISON; ERROR BOUNDS; REFERENCE MATERIALS; SCATTERING PARAMETERS MEASUREMENT;

CALIBRATION;

EID: 41649099258     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2006.281416     Document Type: Conference Paper

References (8)

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