Verification of the wafer-level LRM+ calibration technique for GaAs applications up to 110 GHz

65th ARFTG Microwave Measurements Conference Digest 2005

Volumn , Issue , 2005, Pages 15-19

  Doerner, Ralf ^a   Rumiantsev, Andrej ^b  

^a LEIBNIZ INSTITUT FÜR HÖCHSTFREQUENZTECHNIK   (Germany)

^b SUSS MicroTec Lithography GmbH   (United States)

Author keywords

Calibration; Calibration comparison; Error correction; Scattering parameters measurement

Indexed keywords

BENCHMARKING; CALIBRATION; ERROR CORRECTION; WAVEGUIDES;

CALIBRATION ACCURACY; CALIBRATION COMPARISON; SCATTERING PARAMETERS MEASUREMENT; WORST-CASE ERROR BOUNDS;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 33745271379     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ARFTGS.2005.1500562     Document Type: Conference Paper

References (14)

1. G.F. Engen, C.A. Hoer, "Thru-Reflect-Line: An Improved Technique for Calibrating the Dual Six Port Automatic Network Analyzer", IEEE Trans. Microwave Theory Tech., vol. E7, pp. 987-993. December 1979.
2. R. Marks, "A Multiline Method of Network Analyzer Calibration", IEEE Trans. Microwave Theory Tech., vol. 39, no. 7, pp. 1E05-1E15, July 1991.
3. H.-J. Eul, B. Schiek, "Thru-Match-Reflect: One Result of a Rigorous Theory for De-embedding and Network Analyzer Calibration", Proceedings of the 18th European Microwave Conference, Stockholm, pp. 909-914. 1988.
4. D. Williams, R.Marks, "LRM Probe-Tip Calibration using Nonideal Standards", IEEE Trans. Microwave Theory Tech., vol. 43, no. E, pp. 466-469, February 1995.
5. R. Marks, D. Williams, "A General Waveguide Circuit Theory", J. Res. Natl. Inst Stand. Technol., vol. 97. pp. 533-561, Sept.- Oct. 199E.
6. H.-J. Eul, B. Schiek, "A generalized theory and new calibration procedures", IEEE Trans. Microwave Theory Tech., vol. 39, no. 4, pp. 7E4-731, April 1991.
7. R. Scholz, F. Komdoerfer, B. Senapati, A. Rumiantsev. "Advanced Technique for Broadband On-Wafer RF Device Characterization", 63rd ARFTG Conf. Digest, pp. 83-90, June E004.
8. D. Williams, R. Marks, A. Davidson, "Comparison of On-Wafer Calibrations", 38th ARFTG Conf. Digest, pp. 68-81. December 1991.
9. B. Oldfield, "Wafer Probe Calibration Accuracy Measurements". 48th ARFTG Conf. Digest, pp. 54-58. December 1996.
10. C. Woodin, M. Goff, "Verification of MMIC On-Wafer Microstrip Calibration", IEEE MTT-S Digest, pp. 10E9-103E, 1990.
11. "Manual for Verifying Probe Station Integrity and On-Wafer Measurement Accuracy", NIST/Industrial MMIC Consortium, MIST, E4 August, 1998.
12. [IE] D. Williams. R. Marks, "Transmission Line Capacitance Measurement", IEEE Microwave and Guided Wave Lett., vol. 1, pp. E43-E45. September 1991.
13. R. Marks, D. Williams, "Characteristic Impedance Determination Using Propagation Constant Measurements", IEEE Microwave and Guided Wave Lett., vol. 1, pp. 141-143, June 1991.
14. D. Walker, D. Williams, J. Morgan, "Planar Resistors for Probe Station Calibration", 40th ARFTG Conf. Digest, pp. 1-9, December 199E.