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Volumn 989, Issue , 2007, Pages 359-364
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High rate deposition of amorphous silicon based solar cells using modified very high frequency glow discharge
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS SILICON;
CONVERSION EFFICIENCY;
DEPOSITION;
GLOW DISCHARGES;
STAINLESS STEEL;
SUBSTRATES;
CONVENTIONAL RADIO FREQUENCY;
MODIFIED VERY HIGH FREQUENCY (MVHF) GLOW DISCHARGE;
NIP SOLAR CELLS;
SINGLE-JUNCTION CELLS;
SOLAR CELLS;
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EID: 41549167846
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-0989-a15-04 Document Type: Conference Paper |
Times cited : (13)
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References (8)
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