SCOPUS 정보 검색 플랫폼

Volumn 26, Issue 2, 2008, Pages 481-486

Fabrication process for cantilevers with integrated tunnel junctions

Author keywords

[No Author keywords available]

Indexed keywords

CLAMPED BEAMS; ELECTRON-BEAM DEPOSITION SOURCE; INTEGRATED ELECTRICAL LEADS;

ELECTRIC PROPERTIES; ELECTRON BEAM LITHOGRAPHY; POLYIMIDES;

TUNNEL JUNCTIONS;

ELECTRON BEAMS; LITHOGRAPHY; POLYAMIDES;

EID: 41549161158 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2836428 Document Type: Article

Times cited : (2)

References (14)

1
- 0011456171
- 0021-8979 10.1063/1.359273.
- C. J. Muller and R. de Bruyn Ouboter, J. Appl. Phys. 0021-8979 10.1063/1.359273 77, 5231 (1995).
- (1995) J. Appl. Phys. , vol.77 , pp. 5231
- Muller, C.J.¹ De Bruyn Ouboter, R.²

2
- 0000779563
- 0034-6748 10.1063/1.1146558.
- J. M. van Ruitenbeek, A. Alvarez, I. Pineyro, C. Grahmann, P. Joyez, M. H. Devoret, D. Esteve, and C. Urbina, Rev. Sci. Instrum. 0034-6748 10.1063/1.1146558 67, 108 (1996).
- (1996) Rev. Sci. Instrum. , vol.67 , pp. 108
- Van Ruitenbeek, J.M.¹ Alvarez, A.² Pineyro, I.³ Grahmann, C.⁴ Joyez, P.⁵ Devoret, M.H.⁶ Esteve, D.⁷ Urbina, C.⁸

3
- 33947283166
- 0003-6951 10.1063/1.114994.
- C. Zhou, C. J. Muller, M. R. Deshpande, J. W. Sleight, and M. A. Reed, Appl. Phys. Lett. 0003-6951 10.1063/1.114994 67, 1160 (1995).
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1160
- Zhou, C.¹ Muller, C.J.² Deshpande, M.R.³ Sleight, J.W.⁴ Reed, M.A.⁵

4
- 17344388742
- Y. Chen, K. Peng, and Z. Cui, Microelectron. Eng. 73-74, 278 (2004).
- (2004) Microelectron. Eng. , vol.7374 , pp. 278
- Chen, Y.¹ Peng, K.² Cui, Z.³

5
- 33845254358
- 1071-1023 10.1116/1.2375090.
- B. Cord, C. Dames, K. K. Berggren, and J. Aumentado, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.2375090 24, 3139 (2006).
- (2006) J. Vac. Sci. Technol. B , vol.24 , pp. 3139
- Cord, B.¹ Dames, C.² Berggren, K.K.³ Aumentado, J.⁴

6
- 41549156239
- 1254 Chestnut Street, Newton, MA 02464, www.microchem.com.
- 1254 Chestnut Street, Newton, MA 02464, www.microchem.com, 2007.
- (2007)

7
- 41549111774
- Foundations of Nanomechanics (Springer, Berlin).
- A. N. Cleland, Foundations of Nanomechanics (Springer, Berlin, 2003).
- (2003)
- Cleland, A.N.¹

8
- 0034314806
- 1071-1023 10.1116/1.1313583.
- H. Namatsu, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1313583 18, 3308 (2000).
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 3308
- Namatsu, H.¹

9
- 0029735424
- 1013-9826
- T. W. Clyne, Key Eng. Mater. 116, 307 (1996). 1013-9826
- (1996) Key Eng. Mater. , vol.116 , pp. 307
- Clyne, T.W.¹

10
- 0002663001
- 0039-6028 10.1016/0039-6028(66)90083-5.
- W. M. H. Sachtler, G. J. H. Dorgelo, and A. A. Holscher, Surf. Sci. 0039-6028 10.1016/0039-6028(66)90083-5 5, 221 (1966).
- (1966) Surf. Sci. , vol.5 , pp. 221
- Sachtler, W.M.H.¹ Dorgelo, G.J.H.² Holscher, A.A.³

11
- 0000463211
- 0163-1829 10.1103/PhysRevB.30.4816.
- G. Binnig, N. Garcia, H. Rohrer, J. M. Soler, and T. Flores, Phys. Rev. B 0163-1829 10.1103/PhysRevB.30.4816 30, 4816 (1984).
- (1984) Phys. Rev. B , vol.30 , pp. 4816
- Binnig, G.¹ Garcia, N.² Rohrer, H.³ Soler, J.M.⁴ Flores, T.⁵

12
- 41549156238
- Formulas for Stress and Strain (McGraw-Hill, New York).
- R. J. Roark and W. C. Young, Formulas for Stress and Strain (McGraw-Hill, New York, 1975).
- (1975)
- Roark, R.J.¹ Young, W.C.²

13
- 33646398888
- 1530-6984 10.1021/nl052134m.
- Y. T. Yang, C. Callegari, X. L. Feng, K. L. Ekinci, and M. L. Roukes, Nano Lett. 1530-6984 10.1021/nl052134m 6, 583 (2006).
- (2006) Nano Lett. , vol.6 , pp. 583
- Yang, Y.T.¹ Callegari, C.² Feng, X.L.³ Ekinci, K.L.⁴ Roukes, M.L.⁵

14
- 0000435860
- 0031-9007 10.1103/PhysRevLett.61.726.
- M. F. Bocko, K. A. Stephenson, and R. H. Koch, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.61.726 61, 726 (1988).
- (1988) Phys. Rev. Lett. , vol.61 , pp. 726
- Bocko, M.F.¹ Stephenson, K.A.² Koch, R.H.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.