Evolution of structural and electronic properties in boron-doped nanocrystalline silicon thin films

Materials Research Society Symposium Proceedings

Volumn 989, Issue , 2007, Pages 503-508

  Hyun, Jung Lee ^a   Sazonov, Andrei ^a   Nathan, Arokia ^b  

^a UNIVERSITY OF WATERLOO   (Canada)

^b UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; DOPING (ADDITIVES); ELECTRONIC PROPERTIES; MICROSTRUCTURAL EVOLUTION; NANOCRYSTALLINE SILICON; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

CRYSTALLINITY; DARK CONDUCTIVITY; DRAIN CONTACTS; FIELD EFFECTIVE MOBILITY;

THIN FILMS;

EID: 41549122508     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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