Analog micromirror arrays with orthogonal scanning directions for wavelength-selective 1XN2 switches

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1776-1779

  Tsai, Jui Che ^a   Huang, S ^a   Hah, D ^b   Wu, M C ^a  

^a University of California   (United States)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Insertion loss; Low voltage; Micromirrors; Mirrors; Optical arrays; Optical collimators; Optical diffraction; Optical fiber losses; Optical surface waves; Optical switches

Indexed keywords

ACTUATORS; DIFFRACTION; INSERTION LOSSES; MICROSYSTEMS; MIRRORS; OPTICAL FIBERS; OPTICAL LOSSES; OPTICAL SWITCHES; OPTICAL SYSTEMS; SCANNING; SOLID-STATE SENSORS; SURFACE WAVES; TRANSDUCERS;

LOW VOLTAGES; MICRO MIRROR; OPTICAL ARRAYS; OPTICAL DIFFRACTIONS; OPTICAL FIBER LOSS; OPTICAL SURFACE WAVES;

OPTICAL COLLIMATORS;

EID: 41549142850     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217130     Document Type: Conference Paper

References (11)

1. J. E. Ford, V. A. Aksyuk, D. J. Bishop, and J. A. Walker, "Wavelength add-drop switching using tilting micromirrors," J. Lightwave Technology, vol.17, p.904-11, 1999.
2. J. S. Patel and Y. Silberberg, "Liquid crystal and grating-based multiple-wavelength cross-connect switch," IEEE Photon. Technol. Lett., 7, 514-516 (1995).
3. D. Hah, S. Huang, H. Nguyen, H. Chang, H. Toshiyoshi, and M. C. Wu, "A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuators for WDM routers," OFC 2002, TuO3.
4. D. M. Marom, et al., "Wavelength-selective 1x4 switch for 128 WDM channels at 50GHz spacing," 2002 OFC postdeadline paper, FB7.
5. D. Hah, S. Huang, H. Nguyen, H. Chang, J. C. Tsai, and M. C. Wu, "Low voltage MEMS analog micromirror arrays with hidden vertical comb-drive actuators," Solid-State Sensor, Actuator, and Microsystems Workshop, June 2002, p.11-14.
6. http://www.networkphotonics.com
7. A. R. Ranalli, B. A. Scott, J. P. Kondis, "Liquid crystal-based wavelength selectable cross-connect," ECOC 1999.
8. T. Ducellier, et al., "The MWS 1x4: a high performance wavelength switching building block," ECOC 2002.
9. S. Huang, J. C. Tsai, D. Hah, H, Toshiyoshi, and M. C. Wu, "Open-loop operation of MEMS WDM routers with analog micromirror array," 2002 IEEE/LEOS Optical MEMS Conf.
10. http://www.sandia.gov/mstc/technologies/micromachines/summit5.html
11. D. M. Marom, and Sang-Hyun Oh, "Filter-shape dependence on attenuation mechanism in channelized dynamic spectral equalizers," LEOS 2002.