Analysis and modeling of CD variation for statistical static timing

IEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers, ICCAD

Volumn , Issue , 2006, Pages 60-66

  Cline, Brian ^a   Chopra, Kaviraj ^a   Blaauw, David ^a   Cao, Yu ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

(ALGORITHMIC) COMPLEXITY; (I ,J) CONDITIONS; CD VARIATIONS; CMOS PROCESSING; COMPLEX MODELING; COMPUTER-AIDED DESIGN; CORRELATION MODELING; CRITICAL DIMENSION (CD) MEASUREMENTS; DIE SIZE; INTERNATIONAL CONFERENCES; MODEL ACCURACY; PRINCIPLE COMPONENT ANALYSIS (PCA); PROCESS DATA; PROCESS VARIATIONS; RUN TIME; SCALED CMOS; SIMPLE MODELING; SPATIAL CORRELATION (SC); STATISTICAL STATIC TIMING ANALYSIS (SSTA);

EID: 41549090501     PISSN: 10923152     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICCAD.2006.320134     Document Type: Conference Paper

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