Transmission electron microscopy investigation of the structural characteristics of amorphous tetrahedral carbon films

Thin Solid Films

Volumn 319, Issue 1-2, 1998, Pages 144-147

  Lioutas, Ch B ^a   Vouroutzis, N ^a   Logothetidis, S ^a   Lefakis, H ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Amorphous carbon film; Deposition; Transmission electron microscopy

Indexed keywords

CARBON; CHEMICAL BONDS; FILM GROWTH; MAGNETRON SPUTTERING; SUBSTRATES; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY;

DARK FIELD IMAGING; TETRAHEDRAL CARBON FILMS;

AMORPHOUS FILMS;

EID: 0347813159     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)01110-3     Document Type: Article

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