Development of aluminum nitride/platinum stack structures for an enhanced piezoelectric response

Materials Research Society Symposium Proceedings

Volumn 955, Issue , 2006, Pages 207-209

  Kabulski, Adam ^a   Harman, John ^a   Famouri, Parviz ^a   Korakakis, Dimitris ^a  

^a West Virginia University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; HIGH TEMPERATURE APPLICATIONS; PLATINUM; THIN FILMS; ZINC OXIDE;

ALUMINUM NITRIDE; LEAD ZIRCONATE TITANATE; PIEZOELECTRIC RESPONSES; STACK STRUCTURES;

PIEZOELECTRIC MATERIALS;

EID: 40949146631     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-0955-i15-35     Document Type: Conference Paper

References (7)

1. R.F. Davis, Proceedings of the IEEE, v 79, n 5, May 1991, p 702-712
2. F. Martin, P. Murait, M.-A. Dubois, and A. Pezous, J. Vac. Sci. Technol. A 22(2), Mar/Apr 2004
3. S. Trolier-McKinstry, and P. Murait, Journal or Electroceramics, 12, 7-17, 2004
4. T.T. Leung, and C.W. Ong, Integrated Ferroelectrics, v 57, 2003, p 1201-1211
5. M. Akiyama, K. Nagao, N. Ueno, H. Tateyama, and T. Yamada, Vacuum, v 74, n 3-4, June 2004, p 669-703
6. S. Funakawa, Y. Yamamuro, H. Luo, T. Sugino, Diamond and Related Materials, v 13, n 4-8, April-Aug. 2004, p 994-998
7. S.H. Yang, and M. Yokoyama, Jpn. J. Appl. Phys. Vol. 38(1999) p 209-212