Tin dioxide-based gas sensors for detection of hydrogen fluoride in air

Thin Solid Films

Volumn 436, Issue 1, 2003, Pages 132-136

  Sanchez, J B ^a   Berger, F ^a   Fromm, M ^a   Nadal, M H ^b   Eyraud, V ^b  

^a LRC CEA M07   (France)

^b CENTRE DE VALDUC   (France)

Author keywords

Gas analysis; Hydrogen fluoride; Semiconductor based sensor

Indexed keywords

DEGRADATION; HYDROFLUORIC ACID; SEMICONDUCTOR MATERIALS; TIN COMPOUNDS;

SEMICONDUCTOR-BASED SENSORS;

CHEMICAL SENSORS;

EID: 0038040561     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00508-X     Document Type: Conference Paper

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