Studies on curvature deformation control of bilayer cantilever fabricated by surface micromachining of SOI wafer

Materials Research Society Symposium Proceedings

Volumn 969, Issue , 2007, Pages 119-124

  Huang, Yu Ming ^a   Sohgawa, Masayuki ^a   Noda, Minoru ^a   Yamashita, Kaoru ^a   Okuyama, Masanori ^a   Noma, Haruo ^b  

^a OSAKA UNIVERSITY   (Japan)

^b ADVANCED TELECOMMUNICATIONS RESEARCH INSTITUTE INTERNATIONAL   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; CONTROLLABILITY; DEFLECTION (STRUCTURES); FINITE ELEMENT METHOD; SILICON WAFERS; SURFACE MICROMACHINING;

CURVATURE DEFORMATION CONTROL; SEMICIRCULAR CANTILEVERS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 40949118496     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

1. M. T. Hou and R. Chen, J. Micromech. Microeng. 13, 141 (2003)
2. M. T. Hou and R. Chen, J. Micromech. Microeng. 14, 490 (2004).
3. R. Linnemann, T. Gotszalk, L. Hadjiiski and I. W. Rangelow, Thin Solid Films 264, 159 (1995).
4. E. S. Kolesar, P. B. Allen, J. T. Howard, J. M. Wilken and N. Boydston, Thin Solid Films 355-356, 295 (1999).
5. rd Sensor Symposium, 471 (2006).
6. S. Chatzandroulis, A. Tserepi, D. Goustouridis, P. Normand, and D. Tsoukalas, Microelectro. Eng. 61-62, 955 (2002).
7. T. Takagaki, Y. J. Sun, O. Brandt and K. H. Ploog, App. Phys. Lett. 84, 4756 (2004).
8. th IEEE Int. conf on Micro Electro Mechanical Systems, Miami, Florida, USA, 283 (January-February 2005).
9. S. Yoshida, K. Mizota and H. Noma, Virtual Reality Society of Japan 11 th Annual Conf., Sendai, Japan (September 2006).
10. M. Sohgawa, M. Noda, Y. M. Huang, K. Yamashita, T. Kanashima, M. Okuyama and H. Noma, Proc. of 23rd Sensor Symposium, 165 (2006).
11. "Rika Nenpyo", edited by National Astronomical Observatory of Japan (Maruzen, 2000).
12. K. E. Petersen and C. R. Guarnieri, J. Appl. Phys. 50, 6761 (2006).
13. J. Kim, V. V. Varadan and V. K. Varadan, Int. J. Numer. Methods Eng. 40, 817 (1997).