Detection of defects in metal interconnects by the nonbias-optical beam induced current technique

Journal of Applied Physics

Volumn 86, Issue 11, 1999, Pages 5949-5956

  Koyama, Tohru ^a   Sonoda, Kenichiro ^a   Komori, Junko ^a   Mashiko, Yoji ^a   Umeno, Masataka ^b  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001318037     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371638     Document Type: Article

References (21)

1. S. K. Groothuis and W. H. Schroen, Proc. Int. Rel. Phys. Symp. 25, 1 (1987).
2. F. G. Yost, D. E. Amos, and A. D. Romig, Jr., Proc. Int. Rel. Phys. Symp. 27, 193 (1989).
3. A. Tanikawa and H. Okabayashi, Proc. Int. Rel. Phys. Symp. 28, 209 (1990).
4. T. Hosoda, H. Niwa, H. Yagi, and H. Tsuchikawa, Proc. Int. Rel. Phys. Symp. 29, 77 (1991).
5. M. L. Dreyer, J. Mohr, and T. Zirkle, Proc. Int. Rel. Phys. Symp. 32, 1 (1994).
6. E. I. Cole, Jr., C. R. Bagnell, Jr., B. G. Davies, A. M. Neacsu, W. V. Oxford, and R. H. Propst, Scanning Microsc. 133 (1988).
7. E. I. Cole, Jr. and R. E. Anderson, Proc. Int. Rel. Phys. Symp. 30, 288 (1992).
8. W. L. Smith, C. Welles, A. Bivas, F. G. Yost, and J. E. Campbell, Proc. Int. Rel. Phys. Symp. 28, 200 (1990).
9. K. Haraguchi, Proc. Int. Manuf. Tech. Conf. 12, 693 (1994).
10. H. Komada and K. Shimizu, Jpn. J. Appl. Phys., Part 1 33, 1070 (1994).
11. F. J. Henley, Proc. Int. Rel. Phys. Symp. 69 (1984).
12. J. Sato, H. Namba, T. Kikuchi, K. Yamada, H. Yoshioka, M. Tanaka, and K. Shono, IEICE Trans. Electron. 4, E77 (1994).
13. E. I. Cole, Jr., J. M. Soden, J. L. Rife, D. L. Barton, and C. L. Henderson, Proc. Int. Rel. Phys. Symp. 388 (1993).
14. T. Ishii, K. Azamawari, and K. Miyamoto, IEICE Trans. Electron. R91-34, 29 (1994).
15. T. W. Joseph, A. L. Berry, and B. Bossmann, Proc. Int. Symp. Testing and Failure Anal. 1 (1992).
16. K. Nikawa and S. Tozaki, Proc. Int. Symp. Testing Failure Anal. 303 (1993).
17. K. Nikawa and C. Matsumoto, and S. Inoue, Jpn. J. Appl. Phys., Part 1 34, 2260 (1995).
18. K. Nikawa and S. Inoue, Proc. Int. Rel. Phys. Symp. 34, 346 (1996).
19. T. Koyama, Y. Mashiko, M. Sekine, H. Koyama, and K. Horie, Proc. Int. Rel. Phys. Symp. 33, 228 (1995).
20. Y. Mashiko, T. Koyama, and H. Koyama, Quality and Reliability Engineering International 12, 253 (1996).
21. J. M. Ziman, Principles of the Theory of Solids, 2nd ed. (Cambridge University Press, New York, 1976), Chap. 7.