Recess integration of micro-cleaved laser diode platelets with dielectric waveguides on silicon

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6909, Issue , 2008, Pages

  Fonstad Jr , Clifton G ^a   Rumpler, Joseph J ^a   Barkley, Edward R ^a   Perkins, James M ^a   Famenini, Shaya ^a  

^a USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; OPTIMIZATION; SEMICONDUCTOR LASERS; SILICON WAFERS;

CO-AXIAL COUPLING; CO-AXIAL RECESS INTEGRATION;

DIELECTRIC WAVEGUIDES;

EID: 40749150618     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.773594     Document Type: Conference Paper

References (15)

1. J. M. Perkins and C. G. Fonstad, "Low threshold VCSELs recess-integrated on Si-CMOS ICs," Technical Digest of CLEO 2007, Baltimore, MD, May 2007;
2. 3 heterogeneous integration technologies," Singapore-MIT Alliance Symposium, January 2003 (available at http://dspace.mit.edu/handle/1721.1/3729)
3. M. S. Teo, "Development of pick-and-place assembly techniques for monolithic optopill integration," S.M. Thesis, EECS, MIT, Cambridge, MA, 2005 (available at http://dspace.mit.edu/handle/1721.1/30180)
4. A. Fang, H. Park, R. Jones, O. Cohen, O. Raday, M. Paniccia, and J. E. Bowers, "Hybrid silicon evanescent device platform," IEEE LEOS Newsletter, April 2007, 4-11;
5. A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers "Electrically pumped hybrid AlGaInAs-silicon evanescent laser," Optics Exp. 14, 9203-9210, (2006).
6. E. R. Barkley and C. G. Fonstad Jr., "The impact of CMP and underlying back-end topographic features on losses in deposited dielectric waveguides," IEEE Journal of Quantum Electronics 40, 1709-1714 ( 2004).
7. E. R. Barkley, "The integration of InP/InGaAsP ridge waveguide structures with dielectric waveguides on silicon," Ph.D. Thesis, EECS, MIT, Cambridge, MA, 2006; unpublished, will be posted on http://dspace.mit.edu.
8. J. J. Rumpler, unpublished Ph.D. thesis research; manuscript in preparation.
9. E. R. Barkley and C. G. Fonstad, manuscript in preparation.
10. A. W. Fang, R. Jones, H. Park, O. Cohen, O. Raday, M. J. Paniccia, and J. E. Bowers, "Integrated AlGaInAs-silicon evanescent race track laser and photodetector," Optics Express 15, 2315-2322 (2007)
11. F. Xia, S. Datta, and S. R. Forrest. "A monolithically integrated optical heterodyne receiver". IEEE Photonics Technology Letters 17, 1716-1718, 2005;
12. D. W. Vernooy, J. S. Paslaski, H. A. Blauvelt, R. B. Lee, and K. J. Vahala, "Alignment-insensitive coupling for PLC-based surface mount photonics," IEEE Photonics Technology Letters 16, 269-271 (2004).
13. T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, "Microphotonic devices based on silicon microfabrication techonology," IEEE Journal of Selected Topics in Quantum Electronics 11, 232-240 (2005).
14. J.K. Tu, J.J. Talghader, M.A. Hadley and J.S. Smith, "Fluidic self-assembly of InGaAs vertical cavity surface emitting lasers onto silicon," Electronic Letters 31, 1448-1449 (1995).
15. C. G. Fonstad, "Magnetically Assisted Statistical Assembly - a new heterogeneous integration technique," Technical Digest of the Singapore-MIT Alliance Annual Symposium, January 2002, http://dspace.mit.edu/handle/1721.1/ 3978.