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Volumn 100, Issue 1, 2008, Pages

Preventing kinetic roughening in physical vapor-phase-deposited films

Author keywords

[No Author keywords available]

Indexed keywords

GROWTH KINETICS; MOLECULAR BEAM EPITAXY; PHYSICAL VAPOR DEPOSITION; SPUTTERING; ULTRATHIN FILMS;

EID: 40749101079     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.100.016102     Document Type: Article
Times cited : (12)

References (15)
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    • Maxson, J.B.1    Savage, D.E.2    Liu, F.3
  • 4
    • 33750324658 scopus 로고    scopus 로고
    • NJOPFM 1367-2630 10.1088/1367-2630/8/10/253
    • E. Vasco, New J. Phys. 8, 253 (2006). NJOPFM 1367-2630 10.1088/1367-2630/8/10/253
    • (2006) New J. Phys. , vol.8 , pp. 253
    • Vasco, E.1
  • 5
    • 33846381320 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.98.036104
    • E. Vasco and J.L. Sacedon, Phys. Rev. Lett. 98, 036104 (2007). PRLTAO 0031-9007 10.1103/PhysRevLett.98.036104
    • (2007) Phys. Rev. Lett. , vol.98 , pp. 036104
    • Vasco, E.1    Sacedon, J.L.2
  • 6
    • 0003412161 scopus 로고
    • Ekin ranges describing the interaction of incident nonthermal species (here, atomic Zr and Y) with the matter (3-ML thick YSZ film/InP) were estimated-(i) hyperthermal range (Ekin∼1-24eV) comprising transient mobility and atomic insertion, and (ii) energetic range that embraces the generation of surface adatom-vacancy pairs for Ekin>24eV-using the TRIM code by Pergamon, New York
    • Ekin ranges describing the interaction of incident nonthermal species (here, atomic Zr and Y) with the matter (3-ML thick YSZ film/InP) were estimated-(i) hyperthermal range (Ekin∼1-24eV) comprising transient mobility and atomic insertion, and (ii) energetic range that embraces the generation of surface adatom-vacancy pairs for Ekin>24eV-using the TRIM code by J.F. Ziegler, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
    • (1985) The Stopping and Range of Ions in Solids
    • Ziegler, J.F.1
  • 7
    • 40749106976 scopus 로고    scopus 로고
    • See EPAPS Document No. E-PRLTAO-99-043750 for details. For more information on EPAPS, see http://www.aip.org/pubservs/epaps.html.
  • 10
    • 34548276070 scopus 로고    scopus 로고
    • PRBMDO 0163-1829 10.1103/PhysRevB.76.085431
    • B. Shin and M.J. Aziz, Phys. Rev. B PRBMDO 0163-1829 76, 085431 (2007). 10.1103/PhysRevB.76.085431
    • (2007) Phys. Rev. B , vol.76 , pp. 085431
    • Shin, B.1    Aziz, M.J.2
  • 11
    • 0037717097 scopus 로고    scopus 로고
    • PLEEE8 1063-651X 10.1103/PhysRevE.67.011602
    • B. Hinnemann, H. Hinrichsen, and D.E. Wolf, Phys. Rev. E 67, 011602 (2003). PLEEE8 1063-651X 10.1103/PhysRevE.67.011602
    • (2003) Phys. Rev. e , vol.67 , pp. 011602
    • Hinnemann, B.1    Hinrichsen, H.2    Wolf, D.E.3
  • 12
    • 9944247144 scopus 로고    scopus 로고
    • JCOMEL 0953-8984 10.1088/0953-8984/16/46/007
    • E. Vasco and C. Zaldo, J. Phys. Condens. Matter JCOMEL 0953-8984 16, 8201 (2004). 10.1088/0953-8984/16/46/007
    • (2004) J. Phys. Condens. Matter , vol.16 , pp. 8201
    • Vasco, E.1    Zaldo, C.2
  • 13
    • 40749087216 scopus 로고    scopus 로고
    • See EPAPS Document No. E-PRLTAO-99-043750 for simulation parameters for energetic fluxes: α 0.75 and Xn 0.3. For more information on EPAPS, see http://www.aip.org/pubservs/epaps.html.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.