High frequency piezoelectric MEMS ultrasound transducers

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 12, 2007, Pages 2422-2429

  Mina, Ioanna G ^b   Kim, Hyunsoo ^b   Kim, Insoo ^b   Park, Sung Kyu ^a,b   Choi, Kyusun ^c   Jackson, Thomas N ^a,b   Tutwiler, Richard L ^b   Trolier McKinstry, Susan ^a,b  

^a IEEE

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

^c The Pennsylvania State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; IMAGE RESOLUTION; IMAGING SYSTEMS; MEMS; THIN FILMS; TRANSDUCERS;

ELECTRONIC CIRCUITRY; HIGH-RESOLUTION IMAGING SYSTEMS; ULTRASOUND TRANSDUCERS; XYLOPHONE;

PIEZOELECTRIC DEVICES;

ARTICLE; ECHOGRAPHY; ELECTROCHEMISTRY; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; IMAGE ENHANCEMENT; INSTRUMENTATION; METHODOLOGY; MICROELECTRODE; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; SIGNAL PROCESSING; TRANSDUCER;

ELECTROCHEMISTRY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; IMAGE ENHANCEMENT; MICROELECTRODES; MINIATURIZATION; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SIGNAL PROCESSING, COMPUTER-ASSISTED; TRANSDUCERS; ULTRASONOGRAPHY;

EID: 40649097530     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.555     Document Type: Conference Paper

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