Radio frequency/pulse glow discharge optical emission spectroscopy (rf/pulse-GD-OES)

Zairyo to Kankyo/ Corrosion Engineering

Volumn 56, Issue 12, 2007, Pages 556-559

  Nakamura, Tatsuhito ^a   Hirano, Akihiro ^a   Kawano, Hiroko ^a  

^a HORIBA LTD   (Japan)

Author keywords

Pulse GD OES; Quick depth profiling analysis; Radio frequency glow discharge optical emission spectroscopy; rf GD OES; Surface analysis

Indexed keywords

DEPTH PROFILING; OPTICAL EMISSION SPECTROSCOPY; SURFACE ANALYSIS; SURFACE TREATMENT; THIN FILMS;

QUICK DEPTH PROFILING ANALYSIS; RADIO FREQUENCY;

GLOW DISCHARGES;

EID: 40449096949     PISSN: 09170480     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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