Electrothermally actuated Fabry-Pérot tunable filter with a high tuning efficiency

IEEE Photonics Technology Letters

Volumn 16, Issue 8, 2004, Pages 1894-1896

  Kim, Chang Kyu ^a   Lee, Myung Lae ^a   Jun, Chi Hoon ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; FABRY-PEROT INTERFEROMETERS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; OPTICAL FILTERS; SEMICONDUCTOR GROWTH; SURFACES; THERMOELECTRIC EQUIPMENT;

ELECTROTHERMALLY ACTUATION; FABRY-PEROT TUNABLE FILTER; PARALLEL THERMAL ACTUATORS; SURFACE MICROMACHINING; TUNING EFFICIENCY;

OPTOELECTRONIC DEVICES;

EID: 4043152165     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2004.831060     Document Type: Article

References (9)

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