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Volumn 85, Issue 3, 2004, Pages 416-418
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Wide-range (0.33%-100%) 3C-SiC resistive hydrogen gas sensor development
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Author keywords
[No Author keywords available]
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Indexed keywords
ABSORPTION KINETICS;
CHEMICAL STABILITIES;
CURRENT FLOW;
HYDROGEN GAS SENSORS;
RESPONSE TIME ANALYSIS;
CARBON;
CHEMICAL VAPOR DEPOSITION;
DISSOCIATION;
ELECTRIC RESISTANCE;
ELECTRON ABSORPTION;
EPITAXIAL GROWTH;
EVAPORATION;
FILM GROWTH;
INTERFACES (MATERIALS);
OHMIC CONTACTS;
OXIDATION;
PARAMETER ESTIMATION;
SEMICONDUCTOR MATERIALS;
SILICON CARBIDE;
SURFACE PHENOMENA;
THERMAL CONDUCTIVITY OF GASES;
CHEMICAL SENSORS;
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EID: 4043057218
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1773935 Document Type: Article |
Times cited : (30)
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References (12)
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