Effect of biasing voltages and electrode metals and materials on the sensitivity of electron beam evaporated HfO2 thin film CO sensor

Materials Chemistry and Physics

Volumn 109, Issue 1, 2008, Pages 56-60

  Durrani, S M A ^a   Al Kuhaili, M F ^a  

^a KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS   (Saudi Arabia)

Author keywords

CO sensor; HfO2; Semiconductor sensor; Thin film

Indexed keywords

BIAS VOLTAGE; CARBON MONOXIDE; ELECTRON BEAMS; EVAPORATION; HAFNIUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE;

HAFNIUM OXIDE; SEMICONDUCTOR SENSORS; SENSOR BIASING VOLTAGE;

THIN FILMS;

EID: 39849111511     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2007.10.034     Document Type: Article

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