Optimization of principal-component-analysis-applied in situ spectroscopy data using neural networks and genetic algorithms

Applied Spectroscopy

Volumn 62, Issue 1, 2008, Pages 73-77

  Kim, Byungwhan ^a   Kwon, Min Ji ^a  

^a Sejong University   (South Korea)

Author keywords

Back propagation neural network; BPNN; GA; Genetic algorithms; In situ data; OES; Optical emission spectroscopy; PCA; Principal component analysis

Indexed keywords

GENETIC ALGORITHMS; INDUCTIVELY COUPLED PLASMA; NEURAL NETWORKS; OPTICAL EMISSION SPECTROSCOPY; OPTIMIZATION; PRINCIPAL COMPONENT ANALYSIS; THIN FILMS;

BACKPROPAGATION NEURAL NETWORK; BIPOLAR SIGMOID FUNCTION; DATA VARIANCES; HIDDEN NEURONS; OXIDE ETCH RATE;

DATA REDUCTION;

ALGORITHM; ARTICLE; ARTIFICIAL NEURAL NETWORK; AUTOMATED PATTERN RECOGNITION; MASS SPECTROMETRY; METHODOLOGY; PRINCIPAL COMPONENT ANALYSIS; QUALITY CONTROL; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY;

ALGORITHMS; MASS SPECTROMETRY; NEURAL NETWORKS (COMPUTER); PATTERN RECOGNITION, AUTOMATED; PRINCIPAL COMPONENT ANALYSIS; QUALITY CONTROL; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY;

EID: 39649088266     PISSN: 00037028     EISSN: None     Source Type: Journal    
DOI: 10.1366/000370208783412717     Document Type: Article

References (21)

1. C. Himmel and G. S. May, IEEE Trans. Semicond. Manufact. 6, 103 (1993).
2. B. Kim and G. S. May, IEEE Trans. Semicond. Manufact. 7, 12 (1994).
3. Y. Huang, T. Edgar, D. Himmelblau, and I. Trachtenberg, IEEE Trans. Semi. Manufact. 7, 333 (1994).
4. E. Rietman, IEEE Trans. Semicond. Manufact. 9, 95 (1996).
5. S. Bushman, T. F. Edgar, and I. Trachtenberg, J. Electrochem. Soc. 144, 1379 (1997).
6. T. S. Kim and G. S. May, IEEE Trans. Semicond. Manufact. 22, 128 (1999).
7. J. P. Geisler, C. S. George, and G. S. May, IEEE Trans. Semicond. Manufact. 13, 46 (2000).
8. B. Kim and B. T. Lee, J. Appl. Phys. 98, 034912 (2005).
9. B. Kim, K. Park, and D. Lee, Plasma Source Sci. Technol. 14, 83 (2005).
10. B. Kim and M. G. Park, Appl. Spectrosc 60, 1192 (2006).
11. B. Kim and J. Bae, Microelectron. Eng. 84, 584 (2007).
12. R. Shadmehr, D. Angell, P. B. Chou, G. S. Oherlein, and R. S. Jaffe, J. Electrochem. Soc. 139, 907 (1992).
13. S. J. Hong and G. S. May, IEEE Trans. Semicond. Manufact. 17, 408 (2004).
14. S. J. Hong, G. S. May, and D. C. Park, IEEE Trans. Semicond. Manufact. 16, 598 (2003).
15. B. Kim, J. Bae, and W. S. Hong, J. Vac Sci. Technol. A 23, 355 (2005).
16. L. Fausett, Fundamentals of Neural Networks (Prentice Hall, New Jersey, 1994), Chap. 6, p. 289.
17. B. Kim and J. Bae, Solid State Electron. 49, 1576 (2005).
18. J. E. Jackson, A User's Guide to Principal Components (John Wiley and Sons, New York, 1991).
19. D. E. Goldberg, Genetic Algorithms in Search, Optimization & Machine Learning (Addison Wesley, Reading, MA, 1989).
20. B. Kim, K. H. Kwon, S. K. Kwon, J. M. Park, S. W. Yoo, K. S. Park, and B. W. Kim, J. Vac, Sci. Technol. B 20, 2113 (2002).
21. D. C. Montgomery, Design and Analysis of Experiments (John Wiley and Sons, New York 1991), Chap. 9, p. 270.