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Volumn T129, Issue , 2007, Pages 157-159
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Titanium oxide thin film gas sensors
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL STABILITY;
COMPATIBILIZERS;
ELECTRIC SPACE CHARGE;
MICROFABRICATION;
PERMITTIVITY;
POLYCRYSTALLINE MATERIALS;
SENSITIVITY ANALYSIS;
THIN FILMS;
TITANIUM OXIDES;
COMPATIBILITY;
FUNCTIONAL MATERIALS;
METAL OXIDE SENSORS;
SENSING PROPERTIES;
CHEMICAL SENSORS;
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EID: 39549107895
PISSN: 02811847
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1088/0031-8949/2007/T129/036 Document Type: Conference Paper |
Times cited : (10)
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References (22)
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