Calibration improvement for piezoresistive coefficients of stress sensors on (100) silicon

Physica Scripta T

Volumn T114, Issue , 2004, Pages 205-208

  Song, Weixia ^a   Ristolainen, Eero ^a  

^a TAMPERE UNIVERSITY OF TECHNOLOGY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; PIEZOELECTRIC DEVICES; RESISTORS; STRESS ANALYSIS;

PIEZORESISTIVE COEFFICIENTS; RESISTOR SENSORS; STRESS SENSORS;

SILICON SENSORS;

EID: 39549107758     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1088/0031-8949/2004/T114/052     Document Type: Conference Paper

References (6)

1. Suhling J C, Member and Jaeger R C 2001 IEEE Sensors J. 1 (June) 14
2. Hau W L W, Yuen M M F, Yan G and Chan P C H 2000 A New Stress Chip Design for Electronic Packaging Applications IEEE Int. Symp. on Electronic Materials & Packaging pp 457-8
3. Beer F P and Johnston E R 1981 Mechanics of Materials (New York McGraw-Hill) p 150-9
4. Beaty R E et al 1990 Calibration Considerations for Piezoresistivebased Stresses Proc. 40th Sensors, Electronic Components and Technology Conference, 1990 vol 1 pp 797-806
5. Beaty R E, Jaeger R C, Suhling J C, Johnson R W and Butler R D 1992 Evaluation of Piezoresistive Coefficient Variation in Silicon Stress Sensors Using a FourPoint Bending Test Fixture IEEE Trans. Components, Hybrids Manuf. Technol. 15 (5) 904-14
6. Song W Master of science Thesis pp 37-49